The room temperature permanent magnet probe station provides a test platform for the electrical parameter testing of semiconductor chips. It is connected with different measuring instruments, which can detect the voltage, current, resistance and capacitance voltage characteristic curves of integrated circuits。In addition, it can be used to measure important Hall parameters such as carrier concentration, mobility, resistivity and Hall coefficient of semiconductor materials。Nondestructive testing of chips, wafers and devices at room temperature。
PSPM series Room temperature permanent magnet probe station is a probe station specially developed for room temperature vertical magnetic field electrical measurement environment, providing 0.The 5T vertical magnetic field can carry out repeatable and standard electrical experiments on 2 inch, 4 inch, 6 inch, 8 inch wafers. Different external test equipment can complete the electrical characteristics measurement, parameter measurement, DC measurement, RF measurement and Hall measurement of the device。
特点
• The sample seat can be placed on 8-inch wafer samples. By moving the slide table below the sample seat, the X-Y axis can be moved ±100mm. Moreover, the sample seat itself can be fine-adjusted in three dimensions, making sample testing and sample changing more convenient。
• The base of the probe arm is fixed by magnet adsorption, so that the probe can be adjusted in the three dimensions of X-Y-Z. With the adjustment of the sample seat, the probe can be quickly inserted to any position of the 8-inch sample
• The probe arm adopts three-coaxial cables and three-coaxial connectors. The leakage is small and the leakage current is less than 100fA. The probe arm has built-in cables to avoid messy wiring
• The probe is fixed with a needle sleeve, only the tip of the needle is exposed to reduce leakage
• The permanent magnet adopts electric control, which can realize the forward and backward reversing motion
• The permanent magnet stand and probe stand are separated to prevent vibration from being transmitted to the sample when the magnet is moving
• The sample fixation method adopts porous partition adsorption, with an outer ring, an inner ring and three separately controlled gas adsorption channels in the middle, which can adsorb and fix 1mm*1mm samples
Model classification:
